Minimum size available for the mask.

Question

How much is the minimum size available for the mask, so the features on the wafer cannot be smaller than it?

Answer 1

There is a PDF file named as User Manual that provides information related to the mask creation, commands , etc. I recommend downloading this manual. To find the necessary information easier, press CTRL + F and type mask. I have also searched on other websites, but couldn't find any additional data for the minimum mask size.