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Minimum size available for the mask.

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asked by about CleWin
edited by

How much is the minimum size available for the mask, so the features on the wafer cannot be smaller than it?

1 Answer

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answered by (236k points)

There is a PDF file named as User Manual that provides information related to the mask creation, commands , etc. I recommend downloading this manual. To find the necessary information easier, press CTRL + F and type mask. I have also searched on other websites, but couldn't find any additional data for the minimum mask size.

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